The 300 mm test platform

Semiconductor grade screening and evaluation services for materials, processes, chemicals and consumables.

12 inch Screening Fab

From laboratory scale to production scale: independent evaluation, experiment control as well as pre- and post-processing for optimization of individual process steps.

Industry standard conditions

State-of-the-art equipment for 200/300mm wafers with short processing times for our customers to reduce costs and the time-to-market.

300 mm / 12 inch Fab Services

Screening Fab customers and partners

The Fraunhofer Screening Fab offers semiconductor grade screening and evaluation services for materials, processes, chemicals and consumables from laboratory scale to production scale (for ULSI) for IC manufacturers and suppliers.

We provide experienced scientists, professional wafer handling (ISO 9001) and state-of-the-art equipment for 200/300mm (8/12in) wafers with short processing times for our customers to reduce costs and the time-to-market.

Fraunhofer Screening Fab for:

  • • Consumable Benchmarking,
  • • Process Development,
  • • Technology Integration, 
  • • Pilot Production and
  • • Equipment Evalutation.
Click here for our full process catalogue.
 

Atomic Layer Deposition (ALD)

Leading edge high-k technologies for 300 mm (12in) and smaller wafer sizes in an unique competence center for ALD - bridging the need for initial high investment to large sized companies.

 

Chemical Mechanical Planarization (CMP)

Various CMP processes and novel processes development for newly introduced materials to fulfill the demands of the coming technology nodes.

 

Cleaning Center

Screening, evaluation and optimization of new chemicals and processes from laboratory scale up to testing on own 2x nm node test wafers.

 

Plating Center

Investigation and optimization of the ECD process for the galvanic deposition of metal layers through electrolyte screening, bath life time investigation and process characterization.

Fraunhofer Screening Fab in a nutshell

Wafer transport in 300 mm CMP-tool for brush evalutation.

  • Established test platform for suppliers, material developers and equipment manufacturers under industry conditions.
  • Production like environment with standard industry equipment (200/300 mm)
  • Independent evaluation, experiment control 
  • Direct exchange of wafers with production lines (short loops), professional contamination management and direct link to industrial facilities (connection to industrial media supply)
  • Pre- and post-processing for optimization of individual process steps
  • Fast scale up from Lab to Fab with more than 10 years experience in bringing new materials into manufacturing
  • Economization of resources (equipment, workforce, time)
  • ISO 9001 certified

Fraunhofer Screnning Fab

Contact

Center Nanoelectronic Technologies
Königsbrücker Str. 178
01099 Dresden
Germany
Phone: +49 351 2607-3064